关键词:
Mach-Zehnder interferometers
摘要:
Objective Optical signal processing is widely used in modern communication systems due to its large bandwidth, low loss, and capability for easy parallel transmission. Rectangle filters, as key components in optical signal processing systems, have become a prominent research focus because they meet the requirements of wavelength division multiplexing systems and are well-suited for broadband access applications. Integrated rectangular filters typically use structures such as waveguide gratings (WGs), Mach-Zehnder interferometers (MZIs), and microring resonators (MRRs). Although these designs achieve good performance, they often suffer from drawbacks like large size and complex manufacturing processes. In this paper, we propose an ultra-compact, silicon-based rectangular filter with a high shape factor, which significantly advances the miniaturization of wavelength division multiplexing systems and enhances the performance of elastic optical networks, on-chip optical interconnects, and broadband access systems. Methods Our design utilizes silicon-on-insulator (SOI) technology, where the top silicon layer has a thickness of 220 nm and the buried oxide layer is 2 µm thick. The waveguide is etched to a depth of 220 nm to form a strip waveguide, with an additional 2 µm of SiO2 deposited on top (Fig. 3). The filter consists of a single MRR with a slot fabricated in the resonator, also etched to a depth of 220 nm. By fine-tuning the slot’s length (ls) and width (ws), and the gaps (g1 and g2) between the ring and the straight waveguide, we create an ultra-small rectangle filter. To mitigate the effects of fabrication errors, we incorporate two micro-heaters in the coupling regions of the MRR. The filtering performance is significantly enhanced by adjusting the voltage applied to these heaters. Results and Discussions The gaps between the ring resonator and the input and output waveguides, denoted as g1 and g2 respectively, and the slot dimensions (length ls and width ws) wi