关键词:
Synchrotron radiation
摘要:
Objective Compound refractive lens (CRL) is an indispensable component for focusing high-energy X-rays in the new generation of light source scientific apparatus. CRL achieves focusing by stacking multiple unit lenses, which can easily lead to the accumulation of error defects. Various problems often arise during their fabrication, such as surface deviations, relative transverse offsets, and mutual tilt angles of the front and back surfaces, which can affect the intensity and focal position of the focused beam. It is very important to measure these parameters without damaging the sample to adjust process parameters and optimize lens application. For two-dimensional focusing lenses, microscopy can only detect the single-sided surface profile, and wavefront metrology methods such as X-ray speckle can only qualitatively judge the alignment by restoring figure errors. X-ray computed tomography (CT) can meet the need for overall characterization of the three-dimensional structure of the lens, but there is a problem of missing subsequent data processing. To solve the issue of three-dimensional profile characterization of hyperbolic refractive lenses, we propose a measurement method based on point cloud processing. By fitting and calculating the surface point cloud model obtained from X-ray CT, typical doublesided processing quality parameters, including relative transverse offset, mutual tilt angle, and single-sided curvature radius, can be accurately measured, which provide accurate and detailed data support for fabrication optimization. Methods This method is mainly divided into three steps: first, X-ray CT scanning is used for three-dimensional reconstruction;then, the surface boundary point cloud data is extracted through threshold segmentation;finally, the point cloud model is segmented, fitted, and calculated. In the first step, the sample is scanned using synchrotron radiation X-ray CT to obtain several projection images, which are reconstructed into a three-dimens